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Title: Microtechnologies
Authors: Barzdėnas, Vaidotas
Navickas, Romualdas
Issue Date: 2012
Publisher: VGTU leidykla „Technika“
Citation: Barzdėnas, V.; Navickas, R. 2012. Microtechnologies: A Laboratory Manual. Vilnius: Technika. 147 p.
Description: The book describes theoretical and practical works of key technology issues for microelectronic fabrication and introduces the technology computer-aided design (TCAD) simulation tools to the reader. Examples of computer simulations provide a technically accurate introduction to advanced semiconductor manufacturing technologies: epitaxial growth, thermal oxidation, thermal diffusion and ion implantation, photolithography, etch, metallization. This publication has been produced with the financial assistance of Europe Social Fund and VGTU (Project No VP1-2.2-ŠMM-07-K-01-047). The book is a part of the project “The Essential Renewal of Undergraduates Study Programs of VGTU Electronics Faculty”.
ISBN: 978-609-457-155-8
Appears in Collections:Mokomosios knygos / Study boooks

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