VGTU talpykla > Elektronikos fakultetas / Faculty of Electronics > Mokomosios knygos / Study boooks >

Lietuvių   English
Please use this identifier to cite or link to this item: http://dspace.vgtu.lt/handle/1/1379

Title: Microtechnologies
Authors: Barzdėnas, Vaidotas
Navickas, Romualdas
Issue Date: 2012
Publisher: VGTU leidykla „Technika“
Citation: Barzdėnas, V.; Navickas, R. 2012. Microtechnologies: A Laboratory Manual. Vilnius: Technika. 147 p.
Description: The book describes theoretical and practical works of key technology issues for microelectronic fabrication and introduces the technology computer-aided design (TCAD) simulation tools to the reader. Examples of computer simulations provide a technically accurate introduction to advanced semiconductor manufacturing technologies: epitaxial growth, thermal oxidation, thermal diffusion and ion implantation, photolithography, etch, metallization. This publication has been produced with the financial assistance of Europe Social Fund and VGTU (Project No VP1-2.2-ŠMM-07-K-01-047). The book is a part of the project “The Essential Renewal of Undergraduates Study Programs of VGTU Electronics Faculty”.
URI: http://dspace1.vgtu.lt/handle/1/1379
ISBN: 978-609-457-155-8
Appears in Collections:Mokomosios knygos / Study boooks

Files in This Item:

File Description SizeFormat
1337_Barzdenas,_Navickas_Microtechnologies_web.pdf6.85 MBAdobe PDFView/Open

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

 

Valid XHTML 1.0! DSpace Software Copyright © 2002-2010  Duraspace - Feedback