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VGTU talpykla >
Elektronikos fakultetas / Faculty of Electronics >
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Please use this identifier to cite or link to this item:
http://dspace.vgtu.lt/handle/1/1379
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| Title: | Microtechnologies |
| Authors: | Barzdėnas, Vaidotas
Navickas, Romualdas |
| Issue Date: | 2012 |
| Publisher: | VGTU leidykla „Technika“ |
| Citation: | Barzdėnas, V.; Navickas, R. 2012. Microtechnologies: A Laboratory Manual. Vilnius: Technika. 147 p. |
| Description: | The book describes theoretical and practical works of key technology issues for microelectronic fabrication and introduces the technology computer-aided design (TCAD) simulation tools to the reader. Examples of computer simulations provide a technically accurate introduction to advanced semiconductor manufacturing technologies: epitaxial growth, thermal oxidation, thermal diffusion and ion implantation, photolithography, etch, metallization.
This publication has been produced with the financial assistance of Europe Social Fund and VGTU (Project No VP1-2.2-ŠMM-07-K-01-047). The book is a part of the project “The Essential Renewal of Undergraduates Study Programs of VGTU Electronics Faculty”. |
| URI: | http://dspace1.vgtu.lt/handle/1/1379 |
| ISBN: | 978-609-457-155-8 |
| Appears in Collections: | Mokomosios knygos / Study boooks
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